Detalle Publicación

ARTÍCULO
Enhanced depth control of ultrafast laser micromachining of microchannels in soda-lime glass
Título de la revista: MICROELECTRONIC ENGINEERING
ISSN: 0167-9317
Volumen: 98
Páginas: 672 - 675
Fecha de publicación: 2012
Lugar: WOS
Resumen:
Femtosecond laser micromachining has progressed considerably in the last decade due to the increasing interest in glass microsystems. In this work, we present a systematic study of the femtosecond laser ablation rate of soda-lime glass as a function of the deposited energy and pulse overlapping parameters. Experimental results demonstrate that the incubation effect reported by other authors can be neglected for particular process conditions and a constant ablation rate can be obtained, thus enhancing the depth control of the fabricated features. (C) 2012 Elsevier B.V. All rights reserved.