In many practical situations, the distribution of residual stresses can have a paramount influence on the fatigue and fracture response of materials. In this paper, we describe a method for the local measurement of residual stresses. It consists of Digital Image Correlation (DIC) of Scanning Electron Microscope (SEM) images of a surface, before and after milling a slit using a Focused Ion Beam (FIB). The DIC algorithm used in this work is based on Fourier analysis, which can reach sub-pixel resolution. In order to calculate the internal stresses released during the milling process, the displacements detected with the DIC algorithm are fitted to Finite Element Method (FEM) simulations. Residual stresses measured by this method on a hard metal sample subjected to different laser surface treatments are successfully compared with X-ray diffraction measurements.