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ARTÍCULO

Fabrication of high quality sub-micron Au gratings over large areas with pulsed laser interference lithography for SPR sensors

Título de la revista: OPTICAL MATERIALS EXPRESS
ISSN: 2159-3930
Volumen: 2
Número: 11
Páginas: 1571 - 1579
Fecha de publicación: 2012
Resumen:
Metallic gratings were fabricated using high energy laser interference lithography with a frequency tripled Nd:YAG nanosecond laser. The grating structures were first recorded in a photosensitive layer and afterwards transferred to an Au film. High quality Au gratings with a period of 770 nm and peak-to-valley heights of 20-60 nm exhibiting plasmonic resonance response were successfully designed, fabricated and characterized. (C) 2012 Optical Society of America
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